The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2004
Filed:
Jul. 01, 2002
Mark Hollatz, Neustadt, DE;
Andreas Römer, Dresden, DE;
Infineon Technologies AG, Munich, DE;
Abstract
A process is described for the chemical mechanical machining of semiconductor wafers. A plurality of surfaces are successively subjected to a polishing step, in which they are brought into contact with a polishing device. The polishing device contains a polishing-grain carrier with polishing grains, and the surfaces are moved relative to the polishing device. Material is removed from the surface by the polishing grains, which are fixed in the polishing-grain carrier and may become partially detached from the carrier material during the polishing operation. In each case one or more polishing steps is preceded by a conditioning step for regeneration of the polishing device. The polishing device and a conditioning surface of strong structure are brought into contact with one another and moved relative to one another, with the result that starting states of the polishing-device surface at a beginning of the individual polishing steps are comparable with one another.