The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6821348 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 23, 2004

Filed:

Feb. 14, 2002
Applicant:
Inventors:

Paul F. Baude, Maplewood, MN (US);

Patrick R. Fleming, Lake Elmo, MN (US);

Michael A. Haase, St. Paul, MN (US);

Tommie W. Kelley, Coon Rapid, MN (US);

Dawn V. Muyres, St. Paul, MN (US);

Steven Theiss, Woodbury, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; C23C 1/400 ;
U.S. Cl.
CPC ...
C23C 1/600 ; C23C 1/400 ;
Abstract

In one embodiment, the invention is directed to aperture mask deposition techniques using aperture mask patterns formed in one or more elongated webs of flexible film. The techniques involve sequentially depositing material through mask patterns formed in the film to define layers, or portions of layers, of the circuit. A deposition substrate can also be formed from an elongated web, and the deposition substrate web can be fed through a series of deposition stations. Each deposition station may have an elongated web formed with aperture mask patterns. The elongated web of mask patterns feeds in a direction perpendicular to the deposition substrate web. In this manner, the circuit creation process can be performed in-line. Moreover, the process can be automated to reduce human error and increase throughput.


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Baude, Paul. (2004). In-line deposition processes for circuit fabrication (U.S. Patent No. 6821348). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6821348

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