The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2004
Filed:
Jun. 26, 2001
Applicant:
Inventors:
Akihiro Kimura, Kanagawa, JP;
Kazuhiro Ohki, Chiba, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 9/06 ; H01J 9/10 ; H01J 9/16 ; H01J 9/46 ; H05B 3/310 ;
U.S. Cl.
CPC ...
H01J 9/06 ; H01J 9/10 ; H01J 9/16 ; H01J 9/46 ; H05B 3/310 ;
Abstract
This invention provides an electron source manufacturing apparatus and manufacturing method which facilitate downsizing and operation and are suitable for mass production. The electron source manufacturing apparatus includes a support which supports a substrate having conductors formed on it and has a means for adjusting the temperature of the substrate, a vessel which has a gas inlet port and gas exhaust port and covers a partial region on the surface of the substrate, an unit for introducing and exhausting gas into and from the vessel, and an unit for applying a voltage to the conductors. The support has a groove.