The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2004
Filed:
May. 24, 2002
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 ;
U.S. Cl.
CPC ...
G01L 9/00 ;
Abstract
A reflective movable diaphragm unit having diaphragm portions formed by a circular SiO film, a mesa portion and light-reflecting mirror portion of the SiO film disposed in the center, and a ring-shaped spacer and bonding layer formed of metal layers in the circumferential edge portion of the diaphragm portion , whereby a pressure sensor is formed.