The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6818108 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 16, 2004

Filed:

Jul. 17, 2001
Applicant:
Inventor:

Roman Schertler, Wolfurt, AT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ; H01L 2/1306 ;
U.S. Cl.
CPC ...
C23C 1/434 ; C23C 1/600 ; H01L 2/1306 ;
Abstract

A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable around a drive shaft rotational axis. Two or more conveyors transport at least one workpiece. A linear driver is operationally independent to linearly move respective ones of the two or more conveyors relative to the drive shaft, with a drive component in a radial direction relative to the axis. An obstructing member is provided for closing the openings when one of the conveyors is positioned adjacent to the openings by rotating the transport device and is moved by the linear drive towards the opening.


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Schertler, Roman. (2004). Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece (U.S. Patent No. 6818108). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6818108

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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