The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2004
Filed:
Aug. 28, 2001
Applicant:
Inventors:
Assignee:
Freescale Semiconductor, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 1/64 ; G03C 5/00 ;
U.S. Cl.
CPC ...
B23Q 1/64 ; G03C 5/00 ;
Abstract
An electronic device ( ) is attached to a container ( ) that carries a lithography mask ( ) through a semiconductor factory ( ) form a first station ( ) to a second station ( ). In the device, a receiver unit ( ) receives first data ( ) indicating how the first station has used the mask in a first process; a memory unit ( ) temporarily stores the first data; a processor unit ( ) processes the first data and provides second data ( ) indicating how the second station uses the mask in a second future process; and a transmitter unit ( ) transmits the second data to the second station or to a factory host.