The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2004
Filed:
Oct. 02, 2002
Silicon Integrated Systems Corporation, Hsinchu, TW;
Abstract
A process via mismatch detecting device is disclosed. Because the vias in the detecting circuit of process via mismatch detecting device are mismatched while the vias between the metal layers of the chips are mismatched, by appropriately placing vias in detecting circuit of process via mismatch detecting device properly, metal lines of different metal layers in the detecting circuit can become short-circuited by mismatched vias, so as to output a voltage signal that is higher after vias mismatch and is regarded as the result of detecting via mismatch. Therefore, the direction and quantity of via mismatch between the metal layers in the chip are detected and monitored effectively, so as to optimize the process. Thus, the yield of process is increased and the cost is decreased.