The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2004
Filed:
Dec. 24, 2002
Applicant:
Inventors:
Paul Bacchi, Ross, CA (US);
Paul S. Filipski, Greenbrae, CA (US);
Assignee:
Newport Corporation, Irvine, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/014 ;
U.S. Cl.
CPC ...
H01J 4/014 ;
Abstract
An optical scanning assembly detects positions of wafer specimens stored in a transport box. The scanning assembly includes first and second spaced-apart optical component mounts operatively connected to a deployment mechanism that moves them between extended and retracted positions. The extended positions facilitate specimen scanning operation, and the retracted positions facilitate carrier box front side access during specimen non-scanning processing. A preferred embodiment is a scanning assembly of a differential optical type.