The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2004
Filed:
Jun. 11, 2002
Applicant:
Inventors:
Assignee:
University College London, London, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/00 ; B05D 5/06 ;
U.S. Cl.
CPC ...
G02B 6/00 ; B05D 5/06 ;
Abstract
A method of forming an interferometer film for an interferometer sensor comprises forming a parylene polymer layer ( ) of substantially uniform thickness directly on an interferometer substrate ( ), the layer forming the interferometer film. Since the interferometer film ( ) formed directly onto the surface of the interferometer substrate, there is improved conformity between the two surfaces at the interface between the polymer layer and the substrate and improved uniformity in the thickness of the film.