The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2004
Filed:
Apr. 03, 2003
Wayne D. Cornelius, San Diego, CA (US);
Other;
Abstract
A plasma generator particularly adapted for use as an ion beam generator. The plasma generator includes a plasma chamber body having an interior cavity and formed of a dielectric material such as boron nitride. The plasma chamber body is surrounded by a solenoidal magnet and is coupled to a radiofrequency waveguide. In the preferred embodiment both the plasma chamber body and the waveguide are composed of a dielectric material. Reductions in both the size of the chamber and the size of the waveguide, with resulting reductions in required input power, are achieved over comparable plasma generators. Use of a circularly polarized RF signal enhances coupling between the plasma and the RF signal.