The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2004
Filed:
Sep. 04, 2003
Koichi Takeuchi, Kanagawa, JP;
Sony Corporation, , JP;
Abstract
The present invention comprises the steps of forming a connection hole in an interlayer insulating film including an organic insulating film; forming an inorganic film covering on an upper surface of the interlayer insulating film and an inner surface of the connection hole; forming an organic film for filling inside the connection hole on an inorganic film; removing the organic film inside the connection hole so as to leave a part of the organic film at a bottom of the connection hole; forming a wiring trench connecting to the connection hole in the interlayer insulating film; removing the organic film inside the connection hole; removing the inorganic film; and forming a trench wiring by filling a conductive material in the wiring trench and inside the connection hole and forming a plug continuing from the trench wiring.