The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2004
Filed:
Dec. 05, 2002
Applicant:
Inventor:
Bryan M. Tracy, Oakland, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A method and system for performing backside analysis on a silicon-on-insulator (SOI) device is disclosed. The SOI device includes a silicon layer, a buried oxide layer (BOX), an active layer containing active devices, and multiple metal layers. The method includes opening a window in the silicon layer using the BOX layer as a stop, and using the window as a field of view to view structures in the active layer with a microscope, wherein defects can be detected in the device without delayering any of the metal layers, such that the device remains functional for testing.