The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Aug. 16, 2002
Applicant:
Inventors:
Murali D. Rangachari, Fremont, CA (US);
Arun Kumar Sharma, Cupertino, CA (US);
Ramesh Balakrishnan, Palo Alto, CA (US);
Balaji Pitchaikani, Los Altos Hills, CA (US);
Assignee:
Asyst Technologies, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; G06F 9/44 ;
U.S. Cl.
CPC ...
G06F 1/900 ; G06F 9/44 ;
Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.