The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Nov. 19, 2002
Frieder H. Baumann, Red Bank, NJ (US);
Howard R. Stuart, East Windsor, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
A MEMS optical switch includes a movable cantilevered beam with a waveguide corresponding to one port of the switch. The beam is designed for in-plane motion and can be deflected, e.g., using a three-electrode motion actuator having one electrode on each side of the beam, which itself acts as the third electrode. The beam moves toward a side electrode in response to a voltage difference applied between the beam and that electrode. The beam has two terminal positions, each defined by a stopper. At each terminal position, a bumper portion of the beam is pushed against a corresponding stopper, which aligns the waveguide in the beam with one of two stationary waveguides, each corresponding to a port of the switch. The MEMS switch may be fabricated using a single silicon-on-insulator (SOI) wafer.