The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Jun. 01, 2001
Applicant:
Inventors:
Charles D Carr, Orefield, PA (US);
Lu Fang, Orefield, PA (US);
Dhiraj H Malkani, Breinigsville, PA (US);
Assignee:
Agere Systems Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 2/608 ;
U.S. Cl.
CPC ...
G02B 2/608 ;
Abstract
The invention is a device and method of fabrication where an array of electrostatically activated members of (e.g., movable mirrors) formed in a layer comprising silicon is mounted over a ceramic substrate. The substrate includes conductors formed on a major surface and in via holes formed in the substrate. The conductors are positioned so as to selectively operate the array of mirrors.