The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Apr. 29, 2003
Kazuhiro Nakai, Kyoto, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Abstract
In a pattern writing apparatus for writing a plurality of pattern blocks of LSI chips which are arrayed on a substrate, provided are a rasterization part ( ) for rasterizing LSI data , an expansion/contraction rate calculation part for obtaining the expansion/contraction rate of a substrate ( ) on the basis of an image from a camera ( ), a data correction part ( ) for correcting raster data ( ) in accordance with the expansion/contraction rate and a data generation part ( ) for generating writing data on the basis of the corrected data. From the writing data generated by the data generation part ( ), an array of pattern blocks in which the width of a non-pattern region between adjacent ones of the pattern blocks is changed while the width of each pattern block is maintained is written on the substrate.