The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2004
Filed:
Jul. 16, 2002
Takuji Okamoto, Kanagawa, JP;
Eiichi Yanagi, Tokyo, JP;
Masaharu Suzuki, Kanagawa, JP;
Yoshifumi Nishimoto, Tokyo, JP;
Other;
Abstract
There is provided a position control apparatus and method for a table member which is capable of controlling the positioning of the table through very small displacement thereof, to thereby prevent the position of the table from deviating even when a disturbance such as vibration is applied to the table. A table member is movable relative to the base member in a predetermined direction. A threaded shaft is rotatably mounted on a base member and elastically deformable when twisted. A motor is coupled to one end of the threaded shaft, for rotating the threaded shaft to displace the table member. A pressurizing and fixing member is arranged in the vicinity of a location where the motor is coupled to the threaded shaft, for pressurizing the threaded shaft to be fixed in position.