The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Sep. 10, 2002
Applicant:
Inventors:
Nobuhiro Mukuta, Kyoto, JP;
Jun Kawai, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
A method of preparing a schedule for a substrate processing apparatus having a plurality of resources for processing substrates, the schedule determining timing of using each resource for processing the substrate. The method comprising the steps of determining the timing of using each resource in advance of starting an actual processing of the substrates, defining a capacity resource as a resource usable within a maximum quantity of consumption of a consumer item used by the resources, and using the resources in processing the substrates while avoiding a total quantity of the consumer item used by the resources exceeding the maximum quantity of consumption of the capacity resource.