The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Dec. 31, 2002
Hiromitsu Soneda, Kawasaki, JP;
Satoshi Ueda, Kawasaki, JP;
Hisao Okuda, Kawasaki, JP;
Ippei Sawaki, Kawasaki, JP;
Osamu Tsuboi, Kawasaki, JP;
Yoshihiro Mizuno, Kawasaki, JP;
Norinao Kouma, Kawasaki, JP;
Yoshitaka Nakamura, Suzaka, JP;
Fumio Yamagishi, Kawasaki, JP;
Other;
Abstract
A micro mirror unit includes a micro mirror substrate, a wiring substrate and an electroconductive spacer disposed between these substrates. The micro mirror substrate includes a moving part, a frame and torsion bars connecting the moving part to the frame. The moving part is provided with a mirror-formed portion. The wiring substrate is formed with a wiring pattern. The electroconductive spacer electrically connects the frame to the wiring pattern, while also providing a space between the micro mirror substrate and the wiring substrate.