The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Oct. 30, 2002
Kerry D. Bagwell, Campbell, CA (US);
Greg C. Felix, San Jose, CA (US);
John J. Bockman, Santa Clara, CA (US);
Alan B. Ray, Palo Alto, CA (US);
Agilent Technologies, Inc, Palo Alto, CA (US);
Abstract
A multi-axis interferometer uses a combined beam for a first pass through the interferometer optics. Measurement and reference components of the combined beam that exit the interferometer optics are subject to walk-off that measurement or reference reflector misalignment can cause. A return reflector and non-polarizing beam splitter system split the combined beam into separated input beams for the various axes of the interferometer and return the separated beams for respective second passes through the interferometer optics. Walk-off for the separated beams in the interferometer optics cancels the walk-off for the combined beam to eliminate beam walk-off in separated output beams. Sharing a combined beam for a first pass through the interferometer optics reduces the sizes required for the interferometer optics and reference and measurement mirrors. The multi-axis interferometer may have a single return reflector.