The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Jul. 07, 2003
Faraday Technology Corp., Hsin-Chu, TW;
Abstract
A method for manufacturing a ROM device includes a semiconductor substrate having an array of field-effect transistors within a ROM region. A first dielectric layer covers the array and all transistors are initially in an “ON” state. A second dielectric layer covers at least one layer of metal interconnection formed over the first dielectric layer. The bit lines do not overlap the transistor-sources. A coding photoresist layer is formed on the second dielectric layer and is patterned to form a plurality of apertures defining exposure windows exposing underlying field-effect transistors to be coded permanently to an “OFF” state. A code etching back process is implemented using the photoresist layer as a mask to etch the first and second dielectric layers, the sources of the MOSFETs, and a portion of the substrate through the exposure windows to form a deep trench, disconnecting the coded MOSFETs from the source lines.