The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Sep. 19, 2002
Yong-shik Park, Gyeonggi-do, KR;
Sang-wook Lee, Gyeonggi-do, KR;
Jae-sik Min, Gyeonggi-do, KR;
Seo-hyun Cho, Gyeonggi-do, KR;
Keon Kuk, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A method of manufacturing a monolithic ink-jet printhead includes preparing a silicon substrate, forming an ink passage comprising a manifold supplying ink, an ink chamber filled with ink supplied from the manifold, an ink channel connecting the ink chamber to the manifold, and a nozzle through which the ink is ejected from the ink chamber, on the silicon substrate, and reprocessing a wall of the ink passage by passing XeF gas through the ink passage and dry etching the wall of the ink passage. In the reprocessing of the wall of the ink passage using XeF gas, the wall of the ink passage is smoothed, and a size of the ink passage can be more precisely adjusted to a design dimension, thereby improving a printing performance of the ink-jet printhead.