The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Apr. 25, 2002
Applicant:
Inventors:
Yukimasa Saito, Tokyo, JP;
Hiroshi Sakurai, Tokyo, JP;
Kazumi Tani, Hyogo, JP;
Kiyoshi Miyajima, Hyogo, JP;
Takema Teratani, Hyogo, JP;
Tatsuya Hamaguchi, Yamanashi, JP;
Assignee:
Tocalo Co., Ltd., Hyogo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 1/504 ; B32B 1/518 ; B32B 3/300 ; B05D 5/00 ;
U.S. Cl.
CPC ...
B32B 1/504 ; B32B 1/518 ; B32B 3/300 ; B05D 5/00 ;
Abstract
A member for a semiconductor manufacturing apparatus comprises a steel substrate and a composite oxide film formed on a surface thereof and comprised of silicon oxide-aluminum oxide-chromium oxide and a sintering aid.