The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
May. 24, 2002
James J. Sun, New Brighton, MN (US);
Benjamin Y. H. Liu, North Oaks, MN (US);
MSP Corporation, Shoreview, MN (US);
Abstract
A vapor generator ( ) and connected chemical vapor deposition chamber ( ) for providing a vapor for operations such as chemical vapor deposition has an atomizer ( A, ) for forming an aerosol or droplet spray ( ) separate from a vaporization chamber ( ). The aerosol is passed into a heated vaporization chamber ( ) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber ( ). The vapor and gas stream is preferably passed through a restricted passageway ( ) for mixing before being introduced into the chemical vapor deposition chamber ( ).