The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Nov. 30, 2001
Applicant:
Inventor:
Siang Ping Kwok, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/22 ;
U.S. Cl.
CPC ...
B24B 7/22 ;
Abstract
A three layer film ( ), such as nitride/oxide/nitride for a CMP stop layer ( ). A gap filling material ( ) is polished, stopping on the first film ( ). The first film ( ) is then stripped using an etch chemistry that is selective against removing the second film ( ). CMP is then continued stopping on the third film ( ).