The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2004
Filed:
Nov. 24, 2000
Applicant:
Inventors:
Kenichi Hirota, Fujisawa, JP;
Hitoshi Yamada, Yokosuka, JP;
Kiyoshi Yuasa, Fujisawa, JP;
Eiji Yamaguchi, Kitakoma-gun, JP;
Shinichi Kawaguchi, Kofu, JP;
Takahiro Shimoda, Kofu, JP;
Nobuyuki Nagayama, Nirasaki, JP;
Assignee:
Other;
Primary Examiner:
Int. Cl.
CPC ...
C32G 1/00 ;
U.S. Cl.
CPC ...
C32G 1/00 ;
Abstract
A cleaning solution is used to remove a byproduct derived from a decomposed substance of a process gas containing C and F. The cleaning solution contains 75 wt % N-methyl-2-pyrrolidone, 15 wt % ethylene glycol monobutyl ether, 0.5 wt % surfactant, and 9.5 wt % water. The content of an alkali metal in the cleaning solution is set to be less than 10 ppb.