The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
Dec. 03, 2002
Applicant:
Inventor:
Takashi Kamono, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/752 ; G03B 2/762 ; G03B 2/772 ; G03F 9/00 ;
U.S. Cl.
CPC ...
G03B 2/752 ; G03B 2/762 ; G03B 2/772 ; G03F 9/00 ;
Abstract
A reticle ( ) with a pellicle is movably set on a reticle support table ( ). An inert gas supply portion ( ) and inert gas exhaust portion ( ) are so driven as to sandwich a pellicle frame ( ), and align the pellicle frame ( ). The inert gas supply portion ( ) and inert gas exhaust portion ( ) are brought into tight contact with the pellicle frame ( ). In this state, inert gas is supplied from the inert gas supply portion ( ) into the pellicle space via a vent hole ( ) of the pellicle frame ( ). Inert gas is exhausted to the inert gas exhaust portion ( ) via a vent hole ( ) formed on the opposite side.