The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
Oct. 25, 2001
Applicant:
Inventors:
Patrick C. Herbert, Mentor, OH (US);
Jeffrey R. Annis, Waukesha, WI (US);
Jun J. Yao, San Diego, CA (US);
Winfred L. Morris, Thousand Oaks, CA (US);
Henric Larsson, Oak Park, CA (US);
Richard D. Harris, Solon, OH (US);
Robert J. Kretschmann, Bay Village, OH (US);
Assignee:
Rockwell Automation Technologies, Inc., Mayfield Heights, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 3/302 ;
U.S. Cl.
CPC ...
G01R 3/302 ;
Abstract
In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.