The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
May. 25, 2001
Shea Chen, Plano, TX (US);
Brandon W. Pillans, Dallas, TX (US);
John C. Ehmke, Garland, TX (US);
Zhimin Jamie Yao, Newbury Park, CA (US);
Raytheon Company, Waltham, MA (US);
Abstract
A micro-electro-mechanical (MEMS) switch ( ) has an electrode ( ) covered by a dielectric layer ( ), and has a flexible conductive membrane ( ) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface ( ) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.