The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2004
Filed:
May. 08, 2002
Applicant:
Inventors:
Dana A. Gronbeck, Holliston, MA (US);
George G. Barclay, Jefferson, MA (US);
Leo L. Linehan, Grafton, MA (US);
Kao Xiong, Fitchburg, MA (US);
Subbareddy Kanagasabapathy, Shrewsbury, MA (US);
Assignee:
Shipley Company L.L.C., Marlborough, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 1/73 ; G03C 1/795 ; G03F 7/039 ; G03F 7/30 ; G03F 7/40 ;
U.S. Cl.
CPC ...
G03C 1/73 ; G03C 1/795 ; G03F 7/039 ; G03F 7/30 ; G03F 7/40 ;
Abstract
Disclosed are photoimageable compositions containing silsesquioxane binder polymers and photoactive compounds, methods of forming relief images using such compositions and methods of manufacturing electronic devices using such compositions. Such compositions are useful as photoresists and in the manufacture of optoelectronic devices.