The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Aug. 14, 2001
John Peterson, Woodside, CA (US);
Gabor Szoboszlay, Santa Clara, CA (US);
Andrew J. Hazelton, San Carlos, CA (US);
Nikon Corporation, , JP;
Abstract
A stage assembly ( ) for moving a device ( ) along an X axis and a Y axis includes a stage base ( ), a device table ( ), a stage mover assembly ( ), a measurement system ( ), and a control system ( ). The stage mover assembly ( ) includes a pair X guide movers ( ) ( ) and a Y table mover ( ). The measurement system ( ) includes a first X system ( ) and a second X system ( ). The control system ( ) receives the position signals from the measurement system ( ) and directs current to the X movers ( ) ( ) to move the device table along the X axis. The control system ( ) can be designed to not skip any servo cycles during switching of position signals.