The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2004

Filed:

Jun. 12, 2002
Applicant:
Inventor:

Harry Marth, Waldbronn, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

A piezo linear drive including a group of piezo actuator stacks configured to drive a moving member located in a guidance device, and located on a joint substrate in a hybrid arrangement; wherein within a stack extending from the substrate a first stack part is configured as a longitudinal actuator and a second stack part is configured as a shearing actuator, the second stack part is equipped with a wear-resistant end plate which is in at least one of a clamping contact and shearing contact with the moving member, and at least two identical motors are located adjacent to each other in order to perform alternating clamping and advancing movements during a stepping operation.


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