The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 05, 2004

Filed:

Jul. 31, 2002
Applicant:
Inventors:

Peter Speckbacher, Kirchweidach, DE;

Georg Flatscher, Schneizlreuth, DE;

Michael Allgäuer, Stein/Traun, DE;

Erich Bayer, Trostberg, DE;

Anton Sailer, Traunstein, DE;

Martin Ullrich, Ruhpolding, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/16 ;
U.S. Cl.
CPC ...
G03F 1/16 ;
Abstract

A method for producing a self-supporting electron-optical transparent structure that includes multi-layer strips and recesses located between the multi-layer strips. The method includes applying a first layer to a second layer, presetting a pattern by exposing or irradiating the first layer and etching the pattern out of the first layer so that partial areas of the second layer are uncovered. The method further includes galvanically applying layers to the uncovered partial areas of the second layer so that multi-layer strips are formed thereon and an electron-optical transparent structure is formed and removing the electron-optical transparent structure off the second layer.


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