The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Jun. 17, 2002
Applicant:
Inventors:
Jun Koike, Kanazawa, JP;
Hideharu Ieki, Kanazawa, JP;
Assignee:
Murata Manufacturing Co., Ltd., Kyoto-fu, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 2/302 ; C30B 2/518 ; C01B 1/300 ;
U.S. Cl.
CPC ...
C30B 2/302 ; C30B 2/518 ; C01B 1/300 ;
Abstract
A ZnO/sapphire substrate includes an R-plane sapphire substrate whose (0 1-1 2) planes are parallel to the surface thereof and a ZnO epitaxial film formed on the R-plane sapphire substrate. The (1 1-2 0) planes of the ZnO epitaxial film are disposed with an interplanar spacing in the range of about 1.623 to 1.627 Å parallel to the (0 1-1 2) planes of the R-plane sapphire substrate.