The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 2004
Filed:
Dec. 20, 1999
Applicant:
Inventors:
Karl J. Urquhart, McKinney, TX (US);
John B. Thompson, Sherman, TX (US);
Joe G. Hoffman, Dallas, TX (US);
Assignee:
Air Liquide America L.P., Houston, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 1/504 ;
U.S. Cl.
CPC ...
B01F 1/504 ;
Abstract
Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.