The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Nov. 21, 2002
Applicant:
Inventor:
Kiyoharu Nakao, Isehara, JP;
Assignee:
Komatsu Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/00 ; H01S 3/22 ;
U.S. Cl.
CPC ...
H01S 3/00 ; H01S 3/22 ;
Abstract
In a gas laser device, a compensation time according to electric charges accumulated in a charging capacitor is calculated and, when the compensation time lapsed from a time when an outer trigger was input, a compensation trigger is output to a semiconductor switch to electrically connect the charging capacitor and a first-stage capacitor, whereby a time between the input of the outer trigger and the occurrence of light emission across discharge electrodes becomes constant in each pulse and a semiconductor substrate can be exposed to light with higher accuracy even when any components of a pulse power source are affected by a temperature change.