The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Jul. 11, 2002
Applicant:
Inventors:
Assignee:
Alps Electric Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 2/100 ; G01B 1/128 ;
U.S. Cl.
CPC ...
G01N 2/100 ; G01B 1/128 ;
Abstract
An apparatus for depositing an optical thin film at a high accuracy has a vacuum chamber in which a thin film is formed on a substrate by vapor deposition of a material at a target using ion beams from an ion gun, an optical monitor for optically measuring the thickness of the thin film and outputting transmittance data DT, a crystal monitor for measuring a frequency which changes as the deposition proceeds and for outputting frequency data DF, and a determination circuit . The determination circuit select between the optical monitor and the crystal monitor to control the thickness of the thin film to be formed on the substrate.