The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Dec. 21, 2001
Kenji Nishi, Yokohama, JP;
Kazuya Ota, Ota-ku, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An exposure apparatus and method displace first and second object holders over a base surface that extends in X- and Y-directions. The first object holder can be displaced from a third area to a second area by using a first displacement unit. The second object holder can be displaced from a first area to the second area by using a second displacement unit. The second area is located between the first and third areas. The first and second object holders are alternately coupled to the second displacement unit, such that the first object holder can be displaced from the second area to the first area using the second displacement unit. The first and second object holders also are alternately coupled to the first displacement unit, such that the second object holder can be displaced from the second area to the third area using the first displacement unit. After completion of an exposure operation for a second object on the second object holder in the first area, the second object is moved from the first area to the third area via the second area, and then a first object to be exposed on the first object holder is transferred from the third area to the first area via the second area.