The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Mar. 13, 2001
Applicant:
Inventors:
Richard D. Harris, Solon, OH (US);
Michael J. Knieser, Richmond Heights, OH (US);
Ernst H. Dummermuth, Chesterland, OH (US);
Robert J. Kretschmann, Bay Village, OH (US);
Assignee:
Rockwell Automation Technologies, Inc., Mayfield Heights, OH (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01P 1/36 ; H01P 1/10 ;
U.S. Cl.
CPC ...
H01P 1/36 ; H01P 1/10 ;
Abstract
A microelectromechanical system (MEMS) analog isolator may be created in which an actuator such as an electrostatic motor drives a beam against an opposing force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation.