The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Nov. 13, 2001
Applicant:
Inventors:
Tomofumi Shono, Takatsuki, JP;
Kazuhiro Yamashita, Amagasaki, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/131 ;
U.S. Cl.
CPC ...
H01L 2/131 ;
Abstract
First, an undercoating film made of silicon nitride or silicon nitride oxide is formed on a substrate. Then the undercoating film is subjected to both/either process A of wet-cleaning the undercoating film with a cleaning liquid and/or process B of irradiating ultraviolet light onto the undercoating film. Afterward, an organic thin film is formed on the undercoating film by providing a liquid organic material (a specific organic material is used if only either process A or process B has been performed).