The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 2004
Filed:
Jul. 15, 2003
Dug-Kyu Choi, Suwon-Si, KR;
Yong-Won Seo, Suwon-Si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An air supply apparatus includes a buffer tank for receiving and storing ultra-pure water from an ultra-pure source, a temperature/humidity controller (THC) for conditioning the air using the ultra-pure water from the buffer tank, an ultra-pure water pipe for delivering the ultra-pure water from the ultra-pure source to the buffer tank, and an air pipe for delivering the air from the THC to semiconductor device fabricating equipment. A control mechanism, including at least one valve disposed in the piping of the apparatus, allows the apparatus to be selectively operated in a normal mode in which the ultra-pure water is allowed to flow from the ultra-pure water source to the THC via the buffer tank, and a cleaning mode in which the THC runs using ultra-pure water stored in the buffer tank while the ultra-pure water pipe is being cleaned.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile