The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2004
Filed:
Sep. 24, 1998
Applicant:
Inventors:
Hideo Kato, Utsunomiya, JP;
Hiroshi Maehara, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ; G03F 9/00 ; A61N 5/00 ;
U.S. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ; G03F 9/00 ; A61N 5/00 ;
Abstract
In a projection aligner for illuminating a pattern on a mask with a luminous flux from a light source through an illumination system and projecting the pattern onto a wafer with a projection optical system, a titanium oxide (TiO ) film is provided on the surface of at least one optical unit in the projection aligner. Thus, contamination of the projection aligner can be reduced.