The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2004
Filed:
Nov. 22, 2000
Applicant:
Inventors:
Shoji Okuda, Kasugai, JP;
Makoto Ohashi, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/1333 ;
U.S. Cl.
CPC ...
G02F 1/1333 ;
Abstract
A MOS transistor, an insulating film and a connecting plug are formed on a silicon substrate, and a surface of the insulating film undergoes a CMP polishing, followed by formation of reflectors. Thereafter, a SiN film is formed as a cover film on the reflectors. Next, SOG is coated onto the cover film, and gaps between the reflectors are buried by the SOG. Subsequently, an SOG film undergoes a CMP polishing using the cover film as a stopper, and a surface thereof is flattened.