The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2004
Filed:
Sep. 10, 2001
Applicant:
Inventors:
Bruce M. Warnes, Muskegon, MI (US);
Andrew L. Purvis, New Era, MI (US);
Daniel L. Near, Montague, MI (US);
Assignee:
Howmet Research Corporation, Whitehall, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/608 ;
U.S. Cl.
CPC ...
C23C 1/608 ;
Abstract
Chemical vapor deposition apparatus and method are provided with external metal halide gas generators that reduce leakage of air into the generators so as to improve efficiency of use of the metal charge residing in each generator.