The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
May. 28, 2002
Applicant:
Inventors:
Michael B. Petach, Redondo Beach, CA (US);
Steven W. Fornaca, Torrance, CA (US);
Rocco A. Orsini, Long Beach, CA (US);
Assignee:
Northrop Grumman Corporation, Redondo Beach, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/500 ;
U.S. Cl.
CPC ...
H01J 3/500 ;
Abstract
An EUV radiation source ( ) that employs a steering device ( ) for steering a stream ( ) of droplets ( ) generated by a droplet generator ( ) so that the droplet ( ) are directed towards a target location ( ) to be vaporized by a laser beam ( ). The direction of the stream ( ) of droplets ( ) is sensed by a sensing device ( ). The sensing device ( ) sends a signal to an actuator ( ) that controls the orientation of the steering device ( ) so that the droplets ( ) are directed to the target location ( ).