The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2004
Filed:
Mar. 21, 2002
Homi E. Nariman, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
In one illustrative embodiment, the method involves forming a ring oscillator that includes a first grating structure comprised of a plurality of gate electrode structures for a plurality of N-channel transistors and a second grating structure comprised of a plurality of gate electrode structures for a plurality of P-channel transistors, and measuring the critical dimension and/or profile of at least one of the gate electrode structures in the first grating structure and/or the second grating structure using a scatterometry tool. In another embodiment, the method further involves forming at least one capacitance loading structure, comprised of a plurality of features, as a portion of the ring oscillator, and measuring the critical dimension and/or profile of at least one of the features of the capacitance loading structure using a scatterometry tool.