The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 2004

Filed:

Jun. 28, 2002
Applicant:
Inventors:

Sven Hahn, Wachau Ot Lomnitz, DE;

Michael Lering, Dresden, DE;

Mathias Schulz, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/014 ;
U.S. Cl.
CPC ...
H01J 4/014 ;
Abstract

A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.


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