The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Sep. 12, 2001
Martin Clive Wilson, Wiltshire, GB;
Zarlink Semiconductor Limited, Wiltshire, GB;
Abstract
A semiconductor device comprises a substrate ( ) having an insulating layer ( ) formed on a surface thereof, and a silicon layer ( ) located on a surface of the insulating layer. A trench ( ) extends from a surface of the silicon layer ( ) through the insulating layer ( ) and into the substrate ( ). An insulating liner ( ) is located on the side walls and the base of the trench ( ), and an in-fill ( ) of thermally-conductive material is formed within the insulating liner. The insulating liner ( ), the in-fill material ( ) and the distance over which the trench ) extends into the substrate ( ) are such as to promote flow of heat from the silicon layer ( ) to the substrate.