The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Aug. 05, 2002
Kenneth D. Brennan, Austin, TX (US);
Paul M. Gillespie, Allen, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of forming a via in an integrated circuit is provided. The method includes forming a stack including a first layer, a hard mask layer, and at least one intermediate layer disposed between the first layer and the hard mask layer. The first layer comprises a first metal line. The method further includes forming a channel in the hard mask layer. The channel has a first side and a second side opposite the first side. The method further includes forming a resist layer having an opening extending over both the first and second sides of the channel. The method further includes forming a metal line trench and a via opening aligned with the first and second sides of the channel. The method further includes filling the filling the metal line trench and the via opening with a conductive material to create a second metal line and a via connecting the second metal line with the first metal line.