The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Jun. 05, 2003
Applicant:
Inventor:
Shinji Yokogawa, Kawasaki, JP;
Assignee:
NEC Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/358 ;
U.S. Cl.
CPC ...
H01L 2/358 ;
Abstract
In a semiconductor device including evaluation elements comprising a plurality of first wirings composed of a first wiring layer, a plurality of second wirings composed of a second wiring layer and vias connecting the first wirings and the second wirings, the first wirings and the second wirings are formed in directions almost perpendicular with each other, and relative to the plurality of first wirings juxtaposed with a prescribed interval, the plurality of second wirings connecting the adjacent first wirings are juxtaposed in the length direction of the first wirings, and a plurality of current paths are formed in parallel.